Process optimization and characterization of silicon microneedles fabricated by wet etch technology
Year: 2005
Type: article
Source: Microelectronics Journal
Authors: N. Wilke, A. Mulcahy, S.-R. Ye, A. Morrissey
Institution: Tyndall National Institute
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: European Commission
OpenAlex ID: W2022774431