Work

Organic solvent-free water-developable sugar resist material derived from biomass in green lithography

Year: 2014

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2014.02.026

Authors: Satoshi Takei, Akihiro Oshima, Takumi Ichikawa, Atsushi Sekiguchi, Miki Kashiwakura, Takahiro Kozawa, Seiichi Tagawa, Tomoko G. Oyama, Syoji Ito, Hiroshi Miyasaka

Institutions: Toyama Prefectural University, The University of Osaka, The Institute of Scientific and Industrial Research, The University of Osaka, Japan Atomic Energy Agency

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Responsible consumption and production

Open Access status: closed

Funders: Asahi Glass Foundation, Japan Society for the Promotion of Science

Awards: Investigation of nanoscale spatial heterogeneity in polymeric materials by using 3D single-molecule tracking techniques, G8557312060

OpenAlex ID: W2022945686

FWCI: 2.415

Cites: 40

Cited by: 30

Related to: 10