Work

Magnetically actuated, addressable microstructures

Year: 1997

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/84.623114

Authors: J.W. Judy, R.S. Muller

Institutions: University of California, Los Angeles, University of California, Berkeley

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2023061992

FWCI: 6.018

Cites: 13

Cited by: 256

Related to: 10