Work

CFD-ACE+: a CAD system for simulation and modeling of MEMS

Year: 1999

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.341217

Authors: Phillip J. Stout, H. Q. Yang, Paul Dionne, Andy Leonard, Zhiqiang Tan, Andrzej J. Przekwas, Anantha Krishnan

Institution: CFD Research Corporation (United States)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2023065080

FWCI: 2.902

Cites:

Cited by: 12

Related to: 10