Work

Fabrication challenges for indium phosphide microsystems

Year: 2015

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/25/4/043001

Authors: N P Siwak, X Z Fan, R Ghodssi

Institutions: Physical Sciences (United States), University of Maryland, College Park

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funder: National Science Foundation

OpenAlex ID: W2025967108

FWCI: 1.603

Cites: 123

Cited by: 25

Related to: 10