Work

Determination of pore size distribution in thin films by ellipsometric porosimetry

Year: 2000

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.591390

Authors: M. R. Baklanov, K. P. Mogilnikov, V. G. Polovinkin, F. N. Dultsev

Institutions: IMEC, Institute of Semiconductor Physics

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2026219304

FWCI: 6.613

Cites: 10

Cited by: 518

Related to: 10