Titanium nitride oxidation chemistry: An x-ray photoelectron spectroscopy study
Year: 1992
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.351465
Authors: Naresh C. Saha, Harland G. Tompkins
Institution: Motorola (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2026500752