Work

A Surface Micromachined Spiral-Channel Viscous Pump

Year: 2002

Type: conference-paper

Source: ASME International Mechanical Engineering Congress and Exposition (IMECE)

DOI: 10.1115/imece2002-33667

Authors: Mohammad I. Kilani, Paul C. Galambos, Yousef S. Haik, Ching-Jen Chen

Institutions: Florida State University, Sandia National Laboratories, Florida Agricultural and Mechanical University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2026853374

FWCI: 0.713

Cites:

Cited by: 3

Related to: 10