Work

Fabrication of Three-Dimensional Metalized Movable Microstructures by the Combination of Two-Photon Microfabrication and Electroless Plating

Year: 2012
Type: article
Abstract: We propose a method to fabricate three-dimensional (3D) metallic movable microparts by the combination of two-photon microfabrication and electroless plating. In this method, polymeric movable microparts with anchors made by two-photon microfabrication are metalized by electroless plating, and then the anchors are removed by laser ablation using a femtosecond pulsed laser. As a result, a metalized freely movable micropart whose motion is restricted to a shaft can be produced. We succeeded in fabricating sophisticated 3D metallic microrotors by adjusting the experimental conditions of both electroless copper plating and laser ablation.
Language: English
Open Access status: bronze
OpenAlex ID: W2027138690
FWCI: 2.186
Cites: 33
Cited by: 31
Related to: 10