Work

Chemical Vapor Deposition of Silanes on Plain and Microfabricated Silicon Surfaces

Year: 2002

Type: book-chapter

Source: Springer eBooks

DOI: 10.1007/978-1-4615-0775-8_24

Authors: Ketul C. Popat, Tejal A. Desai

Institution: University of Illinois Chicago

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W202714843

FWCI:

Cites: 11

Cited by: 1

Related to: 10