Work

Arrays of Nanoscale Lenses for Subwavelength Optical Lithography

Year: 2010

Type: article

Source: Nano Letters

DOI: 10.1021/nl101942s

Authors: Jae-Won Jang, Zijian Zheng, One-Sun Lee, Wooyoung Shim, Gengfeng Zheng, George C. Schatz, Chad A. Mirkin

Institutions: Northwestern University, International Institute for Nanotechnology, Hong Kong Polytechnic University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2027760263

FWCI: 2.732

Cites: 42

Cited by: 50

Related to: 10