High aspect ratio silicon pillars fabricated by electrochemical etching and oxidation of macroporous silicon
Year: 1996
Type: article
Source: Thin Solid Films
Authors: H.W Lau, G.J Parker, R Greef
Institution: University of Southampton
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2027890072
