Generalized numerical pressure distribution model for smoothing polishing of irregular midspatial frequency errors
Year: 2014
Type: article
Source: Applied Optics
DOI: 10.1364/ao.53.001020
Authors: Xuqing Nie, Shengyi Li, Feng Shi, Hao Hu
Institution: National University of Defense Technology
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2028047351