Contact analysis studies of an ESCAP resist with scCO 2 compatible additives
Year: 2009
Type: conference-paper
DOI: 10.1117/12.813814
Authors: Abhinav Rastogi, Gregory N. Toepperwein, Manabu Tanaka, Robert A. Riggleman, Juan J. de Pablo, Christopher K. Ober
Institutions: Cornell University, University of Wisconsin–Madison
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2028377408