Work

3-D micromachined hemispherical shell resonators with integrated capacitive transducers

Year: 2012

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2012.6170120

Authors: L. D. Sorenson, X. Gao, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2028585316

FWCI: 17.16

Cites: 8

Cited by: 74

Related to: 10