Work

Electromagnetic particle simulation of electron cyclotron resonance microwave discharge

Year: 1993

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.352825

Authors: Wook Hee Koh, Nak Heon Choi, Duk In Choi, Yong Ho Oh

Institutions: Korea Advanced Institute of Science and Technology, Electronics and Telecommunications Research Institute

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2029192768

FWCI: 1.922

Cites: 11

Cited by: 19

Related to: 10