Work

X-ray microdiffraction: local stress distributions in polycrystalline and epitaxial thin films

Year: 2004

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2003.12.053

Authors: M.A Phillips, R Spolenak, N Tamura, W.L Brown, A.A MacDowell, R.S Celestre, H.A Padmore, B.W Batterman, E Arzt, J.R Patel

Institutions: Max Planck Society, Lawrence Berkeley National Laboratory, Advanced Light Source, Lehigh University, SLAC National Accelerator Laboratory, Stanford Synchrotron Radiation Lightsource, Stanford University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2029633742

FWCI: 6.439

Cites: 18

Cited by: 27

Related to: 10