Work

Capacitive driving and sensing of a bi-axial scanning micromirror for projection display

Year: 2014

Type: conference-paper

Source: Proceedings of the IEEE International Frequency Control Symposium

DOI: 10.1109/fcs.2014.6859890

Authors: Sheng-Gang Fu, David Lin, Harrison Lai, Andrew Hung, Michael S.-C. Lu

Institution: National Tsing Hua University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2030204192

FWCI:

Cites: 2

Cited by: 1

Related to: 10