Work

Micromachined CMOS calorimetric chemical sensor with on-chip low noise amplifier

Year: 1999

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.1999.746887

Authors: A. Koll, A. Schaufelbuhl, N. Scheeberger, U. Munch, O. Brand, H. Baltes, C. Menolfi, Q. Huang

Institutions: ETH Zurich, Integrated Systems Laboratory

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2030588028

FWCI: 9.675

Cites: 7

Cited by: 20

Related to: 10