Work

Atomic Layer Epitaxy

Year: 1984

Type: conference-paper

Source: International Conference on Solid State Devices and Materials (SSDM)

DOI: 10.7567/ssdm.1984.d-10-1

Authors: Tuomo Suntola, Jaakko Hyvarinen

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2030668500

FWCI: 6.878

Cites: 107

Cited by: 1,408

Related to: 10