Work

LIGA-based family of tips for scanning probe applications

Year: 1996

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.250951

Authors: Sandeep Akkaraju, Yohannes M. Desta, BenQiang Li, Michael C. Murphy, Olga Vladimirsky, Yuli Vladimirsky

Institution: Louisiana State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2030781193

FWCI:

Cites:

Cited by: 6

Related to: 10