Work

Oxygen plasma removal of thin polymer films

Year: 1980

Type: article

Source: Polymer Engineering and Science

DOI: 10.1002/pen.760201610

Authors: G. N. Taylor, T. M. Wolf

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2031041994

FWCI: 3.901

Cites: 2

Cited by: 165

Related to: 10