Work

Geometric compensation of (100) single crystal silicon disk resonating gyroscope for mode-matching

Year: 2013

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers.2013.6627119

Authors: C. H. Ahn, E. J. Ng, V. A. Hong, Y. Yang, B. J. Lee, M. W. Ward, T. W. Kenny

Institution: Stanford University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2032364424

FWCI: 3.247

Cites: 9

Cited by: 26

Related to: 10