Work

Binary and complex oxide thin films for microelectronic applications: An insight into their growth and advanced nanoscopic investigation

Year: 2013

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/j.surfcoat.2013.06.069

Authors: Raffaella Lo Nigro, Patrick Fiorenza, Maria R. Catalano, Gabriele Fisichella, Fabrizio Roccaforte, Graziella Malandrino

Institutions: Institute for Microelectronics and Microsystems, University of Catania

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2032619358

FWCI: 0.4

Cites: 89

Cited by: 3

Related to: 10