5 nm thick lanthanum oxide thin films grown on Si(100) by atomic layer deposition: The effect of post-annealing on the electrical properties
Year: 2006
Type: article
Source: Thin Solid Films
Authors: Sang Jin Jo, Jeong Sook Ha, Nam Kyun Park, Dong Kyun Kang, Byong-Ho Kim
Institution: Korea University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2032907020