Work

Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

Year: 2003

Type: article

Abstract: Radial profiles of magnetic fields in the electrostatic (E) and electromagnetic (H) modes of low-frequency (∼500 kHz) inductively coupled plasmas have been measured using miniature magnetic probes. In the low-power (∼170 W) E-mode, the magnetic field pattern is purely linear, with the fundamental frequency harmonics only. After transition to higher-power (∼1130 W) H-mode, the second-harmonic nonlinear azimuthal magnetic field Bφ2ω that is in 4–6 times larger than the fundamental frequency component Bφω, has been observed. A simplified plasma fluid model explaining the generation of the second harmonics of the azimuthal magnetic field in the plasma source is proposed. The nonlinear second harmonic poloidal (r−z) rf current generating the azimuthal magnetic field Bφ2ω is attributed to nonlinear interactions between the fundamental frequency radial and axial magnetic fields with the azimuthal rf current.

Source: Physics of Plasmas

DOI: 10.1063/1.1557871

Authors: K. Ostrikov, E. Tsakadze, S. Xu, S. V. Vladimirov, R. Storer

Institutions: Flinders University, Nanyang Technological University, The University of Sydney

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funders: Agency for Science, Technology and Research, Australian Research Council

OpenAlex ID: W2034346569