Work

Two-stage flow-dividing system for the calibration of vacuum gauges

Year: 2007

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.2823481

Authors: Hajime Yoshida, Kenta Arai, Hitoshi Akimichi, Masahiro Hirata

Institutions: National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology

Language: English

Topic: Scientific Measurement and Uncertainty Evaluation

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

OpenAlex ID: W2034601012

FWCI: 1.111

Cites: 7

Cited by: 14

Related to: 10