Work

Acoustically-engineered multi-port AlN-on-silicon resonators for accurate temperature sensing

Year: 2013

Type: conference-paper

Source: Technical digest - International Electron Devices Meeting/Technical digest

DOI: 10.1109/iedm.2013.6724651

Authors: Roozbeh Tabrizian, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2034680282

FWCI: 5.945

Cites: 8

Cited by: 16

Related to: 10