Inverse vs. traditional OPC for the 22nm node
Work
Year: 2009
Type: article
Cites:
Cited by: 10
Related to: 10
FWCI: 0.481
Citation percentile (by year/subfield): 69.92
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Sustainable Development Goal Industry, innovation and infrastructure
Open Access status: closed