Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask
Year: 1999
Type: article
Source: Thin Solid Films
Authors: P Äyräs, J.T Rantala, R Levy, M.R Descour, S Honkanen, N Peyghambarian
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2034776444
