Hot embossing as a method for the fabrication of polymer high aspect ratio structures
Year: 2000
Type: article
Source: Sensors and Actuators A Physical
Authors: Holger Becker, Ulf Heim
Institution: Jenoptik (Germany)
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2034935888