Hybrid integration of light-emitters and detectors with SOI-based micro-opto-electro-mechanical systems (MOEMS)
Year: 2001
Type: conference-paper
DOI: 10.1117/12.426941
Authors: Joel A. Kubby, Jim Calamita, Jen-Tsorng Chang, Jingkuang Chen, Peter Gulvin, C.-C. Lin, Robert Lofthus, Bill Nowak, Yi Su, Alex Tran, David Burns, Janusz Bryzek, John Gilbert, Charles Hsu, Tom Korsmeyer, Arthur S. Morris III, Thomas E. Plowman, Vladimir L. Rabinovich, Troy D. Daiber, Bruce R. Scharf, Andrew J. Zosel, Li Fan, Jim Hartman, Anis Husain, Nena Golubovic-Laikopoulos, Raji Mali, Tom Pumo, Steve Delvecchio, Shifang Zhou, Michel Rosa, Decai Sun
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2035330026