Fourier Transform Infrared Characterization of Downstream Gas‐Phase Species Generated by Tetraethylorthosilicate/Ozone Atmospheric Pressure Reactions
Year: 1999
Type: article
Abstract: The effluent gas‐phase composition from the atmospheric pressure reaction between tetraethylorthosilicate (TEOS) and ozone was investigated as a function of reactor temperature and initial reactant molar ratio. Online, continuous quantitative determination of gas species was achieved using Fourier transform infrared techniques. TEOS decomposition was a function of initial ozone concentration and reactor temperature. Ozone enhanced TEOS decomposition was found to generate carbon monoxide, carbon dioxide, formic and acetic acids, and water, in addition to unreacted source species. © 1999 The Electrochemical Society. All rights reserved.
DOI: 10.1149/1.1391599
Authors: Josep Arnó, Zheng Yuan, Shawn Murphy
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2035669274