Raman study of structural order of a-SiNx:H and its change upon thermal annealing
Year: 2001
Type: article
Authors: Yan Wang, Ruifeng Yue, Hexiang Han, Xianbo Liao
Institutions: Tsinghua University, Chinese Academy of Sciences
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2035790699
