Work

Passive TCF compensation in high Q silicon micromechanical resonators

Year: 2010

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/memsys.2010.5442553

Authors: A.K. Samarao, G. Casinovi, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2035868474

FWCI: 20.61

Cites: 7

Cited by: 67

Related to: 10