A cryogenic measurement setup for microelectromechanical systems used in space applications
Year: 2005
Type: article
Source: Review of Scientific Instruments
DOI: 10.1063/1.1884192
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Goddard Space Flight Center
OpenAlex ID: W2035888285