Work

Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multi-principal-component (AlCrMoSiTi)N coatings

Year: 2007

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/j.surfcoat.2007.12.014

Authors: Hui-Wen Chang, Ping-Kang Huang, Jien-Wei Yeh, Andrew Davison, Chun-Huei Tsau, Chih-Chao Yang

Institutions: National Tsing Hua University, Chinese Culture University, Industrial Technology Research Institute

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Council

OpenAlex ID: W2035985300

FWCI: 6.914

Cites: 36

Cited by: 204

Related to: 10