Work

Fabrication of nanometer size photoresist wire patterns with a silver nanocrystal shadowmask

Year: 1999

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.581831

Authors: S. H. Choi, K. L. Wang, M. S. Leung, G. W. Stupian, N. Presser, S. W. Chung, G. Markovich, S. H. Kim, J. R. Heath

Institutions: University of California, Los Angeles, The Aerospace Corporation

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: U.S. Air Force, Multidisciplinary University Research Initiative, Office of Naval Research, Army Research Office

Award: G8876996369

OpenAlex ID: W2036094862

FWCI: 1.775

Cites: 8

Cited by: 11

Related to: 10