A Technique For Measuring Slurry‐Flow Dynamics During Chemical ‐ Mechanical Polishing
Year: 1996
Type: article
Source: MRS Proceedings
DOI: 10.1557/proc-447-95
Authors: J. Coppeta, C. Rogers, A. Philipossian, F. Kaufman
Institutions: Tufts University, Intel (United States)
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2036338806