Work

Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators

Year: 2002

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/s0924-4247(02)00307-2

Authors: D. Lange, C. Hagleitner, C Herzog, O. Brand, H. Baltes

Institution: ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Eidgenössische Technische Hochschule Zürich

OpenAlex ID: W2036482563

FWCI: 5.354

Cites: 22

Cited by: 43

Related to: 10