Work

One-dimensional linear acoustic bandgap structures for performance enhancement of AlN-on-Silicon micromechanical resonators

Year: 2011

Type: conference-paper

Source: International Conference on Solid-State Sensors, Actuators and Microsystems

DOI: 10.1109/transducers.2011.5969685

Authors: L. Sorenson, J. L. Fu, F. Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Phenomena Research

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2036849040

FWCI: 3.381

Cites: 14

Cited by: 44

Related to: 10