Work

Nanofabrication by scanning probe microscope lithography: A review

Year: 2005

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.1926293

Authors: Ampere A. Tseng, Andrea Notargiacomo, T. P. Chen

Institutions: Arizona State University, Roma Tre University, Nanyang Technological University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2037012265

FWCI: 16.59

Cites: 94

Cited by: 456

Related to: 10