Work

Auto-alignment for incident angle of ellipsometer

Year: 2001

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.444104

Authors: Sunglim Park, Jaewha Jung, Jeongwoo Seo, Dong Kyun Kang, Dae gab Gweon

Institution: Korea Advanced Institute of Science and Technology

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2037390679

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