Work

Photonic effects in the deactivation of ion implanted arsenic

Year: 1998

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.367228

Authors: R. B. Fair, S. Li

Institution: Duke University

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2037655617

FWCI:

Cites: 29

Cited by: 15

Related to: 10