Work

High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters

Year: 2006

Type: conference-paper

Source: IEEE MTT-S International Microwave Symposium digest

DOI: 10.1109/mwsym.2006.249705

Authors: Farrokh Ayazi, Siavash Pourkamali, Gavin Ho, Reza Abdolvand

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Georgia Institute of Technology, Defense Advanced Research Projects Agency

OpenAlex ID: W2037771288

FWCI: 4.038

Cites: 12

Cited by: 15

Related to: 10