Work

Workpiece charging in electron beam lithography

Year: 1994

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.587300

Authors: J. Ingino, G. Owen, C. N. Berglund, R. Browning, R. F. W. Pease

Institution: Stanford University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Semiconductor Research Corporation

OpenAlex ID: W2037936297

FWCI:

Cites:

Cited by: 16

Related to: 10