Work

Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications

Year: 2009

Type: article

Abstract: Femtosecond laser fabrication of three-dimensional structures for photonics applications is reviewed. Fabrication of photonic crystal structures by direct laser writing and holographic recording by multiple beam interference techniques are discussed. The physical mechanisms associated with structure formation and postfabrication are described. The advantages and limitations of various femtosecond laser microfabrication techniques for the preparation of photonic crystals and elements of microelectromechanical and micro-optofluidic systems are discussed.

Source: Journal of Applied Physics

DOI: 10.1063/1.3216462

Authors: Saulius Juodkazis, Vygantas Mizeikis, Hiroaki Misawa

Institutions: Hokkaido University, Japan Science and Technology Agency, Research Institute for Electronic Science, Hokkaido University, Shizuoka University, Research Institute of Electronics, Shizuoka University

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

Funders: Strong, Japan Society for the Promotion of Science

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