Agile scanning using a MEMS focus control mirror in a commercial confocal microscope
Year: 2014
Type: conference-paper
DOI: 10.1117/12.2042249
Authors: Sarah J. Lukes, David L. Dickensheets
Institution: Montana State University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2039034313