Characterization of a monolithic silicon MEMS technology in standard CMOS process
Year: 2001
Type: conference-paper
DOI: 10.1117/12.448003
Authors: Kuntao Ye, Fred R. Beyette, Jr.
Institution: University of Cincinnati
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W2039246386