Work

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

Year: 1974

Type: article

Source: Journal of Vacuum Science and Technology

DOI: 10.1116/1.1312732

Author: John A. Thornton

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2040179900

FWCI: 13.73

Cites: 1

Cited by: 2,523

Related to: 10